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Icp Etching Wafer Holder Silicon Carbide Sic Plate In Led Industry

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Icp Etching Wafer Holder Silicon Carbide Sic Plate In Led Industry

Name: Icp Etching Wafer Holder Silicon Carbide Sic Plate In Led Industry
Brand: KeGu
Price: 200 USD

Wholesale Icp Etching Wafer Holder Silicon Carbide Sic Plate In Led Industry from china suppliers

Brand Name : KeGu

Place of Origin : China

Payment Terms : L/C,D/A,D/P,T/T,Western Union,MoneyGram

Supply Ability : 2,000 pcs/month

Packaging Details : Strong wooden box for Global shipping

Model Number : Customizable

Price : 200-500 yuan/kg

Material : SiC

Composition:SiC : >98%

Color : Black

Density : >3.05g/cm3

Max. Service Temp : 1650°C

Flexural Strength : 380MPa

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Silicon Carbide (sic) Trays Or Plate, As A Wafer Holder For Icp Etching Process In Led Industry

Description:

Silicon Carbide (SiC) Trays or plate used as a wafer holder for ICP etching process in LED industry.

Silicon carbide (SiC) is a has excellent thermal conductivity, corrosion resistance, and with low thermal expansion. Silicon carbide is an excellent material for sealing rings and bearings. Silicon carbide trays have excellent corrosion resistance, great wear resistance, great mechanical strength under high temperatures. We supply many sizes of silicon carbide trays as well as other SiC products.

Silicon Carbide Trays Properties:

Compound Formula	SiC
Molecular Weight	40.1
Appearance	Black
Melting Point	2,730° C (4,946° F) (decomposes)
Density	3.0 to 3.2 g/cm3
Electrical Resistivity	1 to 4 10x Ω-m
Poisson’s Ratio	0.15 to 0.21
Specific Heat	670 to 1180 J/kg-K

Silicon Carbide Tray Specifications:

Type	Recrystallized SiC	Sintered SiC	Reaction Bonded SiC
Purity of Silicon Carbide	99.5%	98%	>88%
Max. Working Temp. (`C)	1650	1550	1300
Bulk Density (g/cm3)	2.7	3.1	>3
Appearance Porosity	<15%	2.5	0.1
Flexural strength (MPa)	110	400	380
Compressive strength (MPa)	>300	2200	2100
Thermal expansion (10^-6/`C)	4.6 (1200`C)	4.0 (<500`C)	4.4 (<500`C)
Thermal conductivity (W/m.K)	35~36	110	65
Main characteristics	High temp. High resistance. High purity	Fracture Toughness	Chemical Resistance

Feature requirement:

Excellent thermal conductivity
Resistant to plasma shock
Good temperature uniformity

Applications:
-Silicon carbide can be applied in areas such as semiconductor and coating.
-Our silicon carbide trays are widely used in LED industry.

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